3/14/2010	12:32:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2010	12:32:26 PM	Recipe started at 12:32 PM
3/14/2010	12:32:26 PM	H2 valve closed
3/14/2010	12:32:26 PM	BCl3 valve closed
3/14/2010	12:32:26 PM	PH3 valve closed
3/14/2010	12:32:26 PM	SiCl4 pre valve closed
3/14/2010	12:32:26 PM	SiCl4 post valve closed
3/14/2010	12:32:26 PM	Main Vac valve closed
3/14/2010	12:32:26 PM	Bypass valve closed
3/14/2010	12:32:26 PM	Bubbler valve closed
3/14/2010	12:32:26 PM	Helium valve opened
3/14/2010	12:32:26 PM	Helium MFC set to  500.000000
3/14/2010	12:32:26 PM	H2 MFC set to  0.000000
3/14/2010	12:32:26 PM	BCl3 MFC set to  0.000000
3/14/2010	12:32:26 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:32:26 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:32:26 PM	Tube furnace set to 0
3/14/2010	12:33:48 PM	Helium valve closed
3/14/2010	12:33:48 PM	H2 valve closed
3/14/2010	12:33:48 PM	BCl3 valve closed
3/14/2010	12:33:48 PM	PH3 valve closed
3/14/2010	12:33:48 PM	SiCl4 pre valve closed
3/14/2010	12:33:48 PM	SiCl4 post valve closed
3/14/2010	12:33:48 PM	Main Vac valve closed
3/14/2010	12:33:48 PM	Bypass valve closed
3/14/2010	12:33:48 PM	Bubbler valve closed
3/14/2010	12:33:48 PM	Helium MFC set to  0.000000
3/14/2010	12:33:48 PM	H2 MFC set to  0.000000
3/14/2010	12:33:48 PM	BCl3 MFC set to  0.000000
3/14/2010	12:33:48 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:33:48 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:33:48 PM	Tube furnace set to 0
3/14/2010	12:33:49 PM	Run finished at 12:33 PM
3/14/2010	12:33:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2010	12:40:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2010	12:40:29 PM	Recipe started at 12:40 PM
3/14/2010	12:40:29 PM	Helium valve closed
3/14/2010	12:40:29 PM	H2 valve closed
3/14/2010	12:40:29 PM	BCl3 valve closed
3/14/2010	12:40:29 PM	PH3 valve closed
3/14/2010	12:40:29 PM	SiCl4 pre valve closed
3/14/2010	12:40:29 PM	SiCl4 post valve closed
3/14/2010	12:40:29 PM	Main Vac valve closed
3/14/2010	12:40:29 PM	Bubbler valve closed
3/14/2010	12:40:29 PM	Bypass valve opened
3/14/2010	12:40:29 PM	Helium MFC set to  0.000000
3/14/2010	12:40:29 PM	H2 MFC set to  0.000000
3/14/2010	12:40:29 PM	BCl3 MFC set to  0.000000
3/14/2010	12:40:29 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:40:29 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:40:29 PM	Tube furnace set to 0
3/14/2010	12:41:00 PM	Helium valve closed
3/14/2010	12:41:00 PM	H2 valve closed
3/14/2010	12:41:00 PM	BCl3 valve closed
3/14/2010	12:41:00 PM	PH3 valve closed
3/14/2010	12:41:00 PM	SiCl4 pre valve closed
3/14/2010	12:41:00 PM	SiCl4 post valve closed
3/14/2010	12:41:00 PM	Bubbler valve closed
3/14/2010	12:41:00 PM	Main Vac valve opened
3/14/2010	12:41:00 PM	Bypass valve opened
3/14/2010	12:41:00 PM	Helium MFC set to  0.000000
3/14/2010	12:41:00 PM	H2 MFC set to  0.000000
3/14/2010	12:41:00 PM	BCl3 MFC set to  0.000000
3/14/2010	12:41:00 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:41:00 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:41:00 PM	Tube furnace set to 0
3/14/2010	12:41:00 PM	Run finished at 12:41 PM
3/14/2010	12:41:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2010	12:42:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/14/2010	12:42:41 PM	Recipe started at 12:42 PM
3/14/2010	12:42:41 PM	H2 valve closed
3/14/2010	12:42:41 PM	BCl3 valve closed
3/14/2010	12:42:41 PM	PH3 valve closed
3/14/2010	12:42:41 PM	SiCl4 pre valve closed
3/14/2010	12:42:41 PM	SiCl4 post valve closed
3/14/2010	12:42:41 PM	Main Vac valve closed
3/14/2010	12:42:41 PM	Bypass valve closed
3/14/2010	12:42:41 PM	Bubbler valve closed
3/14/2010	12:42:41 PM	Helium valve opened
3/14/2010	12:42:41 PM	Helium MFC set to  500.000000
3/14/2010	12:42:41 PM	H2 MFC set to  0.000000
3/14/2010	12:42:41 PM	BCl3 MFC set to  0.000000
3/14/2010	12:42:41 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:42:41 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:42:41 PM	Tube furnace set to 0
3/14/2010	12:44:04 PM	Helium valve closed
3/14/2010	12:44:04 PM	H2 valve closed
3/14/2010	12:44:04 PM	BCl3 valve closed
3/14/2010	12:44:04 PM	PH3 valve closed
3/14/2010	12:44:04 PM	SiCl4 pre valve closed
3/14/2010	12:44:04 PM	SiCl4 post valve closed
3/14/2010	12:44:04 PM	Main Vac valve closed
3/14/2010	12:44:04 PM	Bypass valve closed
3/14/2010	12:44:04 PM	Bubbler valve closed
3/14/2010	12:44:04 PM	Helium MFC set to  0.000000
3/14/2010	12:44:04 PM	H2 MFC set to  0.000000
3/14/2010	12:44:04 PM	BCl3 MFC set to  0.000000
3/14/2010	12:44:04 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:44:04 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:44:04 PM	Tube furnace set to 0
3/14/2010	12:44:19 PM	Helium valve closed
3/14/2010	12:44:19 PM	H2 valve closed
3/14/2010	12:44:19 PM	BCl3 valve closed
3/14/2010	12:44:19 PM	PH3 valve closed
3/14/2010	12:44:19 PM	SiCl4 pre valve closed
3/14/2010	12:44:19 PM	SiCl4 post valve closed
3/14/2010	12:44:19 PM	Main Vac valve closed
3/14/2010	12:44:19 PM	Bubbler valve closed
3/14/2010	12:44:19 PM	Bypass valve opened
3/14/2010	12:44:19 PM	Helium MFC set to  0.000000
3/14/2010	12:44:19 PM	H2 MFC set to  0.000000
3/14/2010	12:44:19 PM	BCl3 MFC set to  0.000000
3/14/2010	12:44:19 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:44:19 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:44:19 PM	Tube furnace set to 0
3/14/2010	12:44:41 PM	Helium valve closed
3/14/2010	12:44:41 PM	H2 valve closed
3/14/2010	12:44:41 PM	BCl3 valve closed
3/14/2010	12:44:41 PM	PH3 valve closed
3/14/2010	12:44:41 PM	SiCl4 pre valve closed
3/14/2010	12:44:41 PM	SiCl4 post valve closed
3/14/2010	12:44:41 PM	Bubbler valve closed
3/14/2010	12:44:41 PM	Main Vac valve opened
3/14/2010	12:44:41 PM	Bypass valve opened
3/14/2010	12:44:41 PM	Helium MFC set to  0.000000
3/14/2010	12:44:41 PM	H2 MFC set to  0.000000
3/14/2010	12:44:41 PM	BCl3 MFC set to  0.000000
3/14/2010	12:44:41 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:44:41 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:44:41 PM	Tube furnace set to 0
3/14/2010	12:49:42 PM	H2 valve closed
3/14/2010	12:49:42 PM	BCl3 valve closed
3/14/2010	12:49:42 PM	PH3 valve closed
3/14/2010	12:49:42 PM	SiCl4 pre valve closed
3/14/2010	12:49:42 PM	SiCl4 post valve closed
3/14/2010	12:49:42 PM	Main Vac valve closed
3/14/2010	12:49:42 PM	Bypass valve closed
3/14/2010	12:49:42 PM	Bubbler valve closed
3/14/2010	12:49:42 PM	Helium valve opened
3/14/2010	12:49:42 PM	Helium MFC set to  500.000000
3/14/2010	12:49:42 PM	H2 MFC set to  0.000000
3/14/2010	12:49:42 PM	BCl3 MFC set to  0.000000
3/14/2010	12:49:42 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:49:42 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:49:42 PM	Tube furnace set to 0
3/14/2010	12:51:05 PM	Helium valve closed
3/14/2010	12:51:05 PM	H2 valve closed
3/14/2010	12:51:05 PM	BCl3 valve closed
3/14/2010	12:51:05 PM	PH3 valve closed
3/14/2010	12:51:05 PM	SiCl4 pre valve closed
3/14/2010	12:51:05 PM	SiCl4 post valve closed
3/14/2010	12:51:05 PM	Main Vac valve closed
3/14/2010	12:51:05 PM	Bypass valve closed
3/14/2010	12:51:05 PM	Bubbler valve closed
3/14/2010	12:51:05 PM	Helium MFC set to  0.000000
3/14/2010	12:51:05 PM	H2 MFC set to  0.000000
3/14/2010	12:51:05 PM	BCl3 MFC set to  0.000000
3/14/2010	12:51:05 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:51:05 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:51:05 PM	Tube furnace set to 0
3/14/2010	12:51:20 PM	Helium valve closed
3/14/2010	12:51:20 PM	H2 valve closed
3/14/2010	12:51:20 PM	BCl3 valve closed
3/14/2010	12:51:20 PM	PH3 valve closed
3/14/2010	12:51:20 PM	SiCl4 pre valve closed
3/14/2010	12:51:20 PM	SiCl4 post valve closed
3/14/2010	12:51:20 PM	Main Vac valve closed
3/14/2010	12:51:20 PM	Bubbler valve closed
3/14/2010	12:51:20 PM	Bypass valve opened
3/14/2010	12:51:20 PM	Helium MFC set to  0.000000
3/14/2010	12:51:20 PM	H2 MFC set to  0.000000
3/14/2010	12:51:20 PM	BCl3 MFC set to  0.000000
3/14/2010	12:51:20 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:51:20 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:51:20 PM	Tube furnace set to 0
3/14/2010	12:51:42 PM	Helium valve closed
3/14/2010	12:51:42 PM	H2 valve closed
3/14/2010	12:51:42 PM	BCl3 valve closed
3/14/2010	12:51:42 PM	PH3 valve closed
3/14/2010	12:51:42 PM	SiCl4 pre valve closed
3/14/2010	12:51:42 PM	SiCl4 post valve closed
3/14/2010	12:51:42 PM	Bubbler valve closed
3/14/2010	12:51:42 PM	Main Vac valve opened
3/14/2010	12:51:42 PM	Bypass valve opened
3/14/2010	12:51:42 PM	Helium MFC set to  0.000000
3/14/2010	12:51:42 PM	H2 MFC set to  0.000000
3/14/2010	12:51:42 PM	BCl3 MFC set to  0.000000
3/14/2010	12:51:42 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:51:42 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:51:42 PM	Tube furnace set to 0
3/14/2010	12:53:15 PM	Run aborted at 12:53 PM
3/14/2010	12:53:15 PM	Helium valve closed
3/14/2010	12:53:15 PM	H2 valve closed
3/14/2010	12:53:15 PM	BCl3 valve closed
3/14/2010	12:53:15 PM	PH3 valve closed
3/14/2010	12:53:15 PM	SiCl4 pre valve closed
3/14/2010	12:53:15 PM	SiCl4 post valve closed
3/14/2010	12:53:15 PM	Bypass valve closed
3/14/2010	12:53:15 PM	Main Vac valve closed
3/14/2010	12:53:15 PM	Bubbler valve closed
3/14/2010	12:53:15 PM	Helium MFC set to  0.000000
3/14/2010	12:53:15 PM	H2 MFC set to  0.000000
3/14/2010	12:53:15 PM	BCl3 MFC set to  0.000000
3/14/2010	12:53:15 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:53:15 PM	Tube furnace set to 0
3/14/2010	12:53:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/14/2010	12:53:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/14/2010	12:53:26 PM	Recipe started at 12:53 PM
3/14/2010	12:53:26 PM	H2 valve closed
3/14/2010	12:53:26 PM	BCl3 valve closed
3/14/2010	12:53:26 PM	PH3 valve closed
3/14/2010	12:53:26 PM	SiCl4 pre valve closed
3/14/2010	12:53:26 PM	SiCl4 post valve closed
3/14/2010	12:53:26 PM	Main Vac valve closed
3/14/2010	12:53:26 PM	Bypass valve closed
3/14/2010	12:53:26 PM	Bubbler valve closed
3/14/2010	12:53:26 PM	Helium valve opened
3/14/2010	12:53:26 PM	Helium MFC set to  500.000000
3/14/2010	12:53:26 PM	H2 MFC set to  0.000000
3/14/2010	12:53:26 PM	BCl3 MFC set to  0.000000
3/14/2010	12:53:26 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:53:26 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:53:26 PM	Tube furnace set to 0
3/14/2010	12:54:48 PM	Helium valve closed
3/14/2010	12:54:48 PM	H2 valve closed
3/14/2010	12:54:48 PM	BCl3 valve closed
3/14/2010	12:54:48 PM	PH3 valve closed
3/14/2010	12:54:48 PM	SiCl4 pre valve closed
3/14/2010	12:54:48 PM	SiCl4 post valve closed
3/14/2010	12:54:48 PM	Main Vac valve closed
3/14/2010	12:54:48 PM	Bypass valve closed
3/14/2010	12:54:48 PM	Bubbler valve closed
3/14/2010	12:54:48 PM	Helium MFC set to  0.000000
3/14/2010	12:54:48 PM	H2 MFC set to  0.000000
3/14/2010	12:54:48 PM	BCl3 MFC set to  0.000000
3/14/2010	12:54:48 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:54:48 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:54:48 PM	Tube furnace set to 0
3/14/2010	12:55:03 PM	Helium valve closed
3/14/2010	12:55:03 PM	H2 valve closed
3/14/2010	12:55:03 PM	BCl3 valve closed
3/14/2010	12:55:03 PM	PH3 valve closed
3/14/2010	12:55:03 PM	SiCl4 pre valve closed
3/14/2010	12:55:03 PM	SiCl4 post valve closed
3/14/2010	12:55:03 PM	Main Vac valve closed
3/14/2010	12:55:03 PM	Bubbler valve closed
3/14/2010	12:55:03 PM	Bypass valve opened
3/14/2010	12:55:03 PM	Helium MFC set to  0.000000
3/14/2010	12:55:03 PM	H2 MFC set to  0.000000
3/14/2010	12:55:03 PM	BCl3 MFC set to  0.000000
3/14/2010	12:55:03 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:55:03 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:55:03 PM	Tube furnace set to 0
3/14/2010	12:55:26 PM	Helium valve closed
3/14/2010	12:55:26 PM	H2 valve closed
3/14/2010	12:55:26 PM	BCl3 valve closed
3/14/2010	12:55:26 PM	PH3 valve closed
3/14/2010	12:55:26 PM	SiCl4 pre valve closed
3/14/2010	12:55:26 PM	SiCl4 post valve closed
3/14/2010	12:55:26 PM	Bubbler valve closed
3/14/2010	12:55:26 PM	Main Vac valve opened
3/14/2010	12:55:26 PM	Bypass valve opened
3/14/2010	12:55:26 PM	Helium MFC set to  0.000000
3/14/2010	12:55:26 PM	H2 MFC set to  0.000000
3/14/2010	12:55:26 PM	BCl3 MFC set to  0.000000
3/14/2010	12:55:26 PM	SiCl4 MFC set to  0.000000
3/14/2010	12:55:26 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	12:55:26 PM	Tube furnace set to 0
3/14/2010	1:00:26 PM	H2 valve closed
3/14/2010	1:00:26 PM	BCl3 valve closed
3/14/2010	1:00:26 PM	PH3 valve closed
3/14/2010	1:00:26 PM	SiCl4 pre valve closed
3/14/2010	1:00:26 PM	SiCl4 post valve closed
3/14/2010	1:00:26 PM	Main Vac valve closed
3/14/2010	1:00:26 PM	Bypass valve closed
3/14/2010	1:00:26 PM	Bubbler valve closed
3/14/2010	1:00:26 PM	Helium valve opened
3/14/2010	1:00:26 PM	Helium MFC set to  500.000000
3/14/2010	1:00:26 PM	H2 MFC set to  0.000000
3/14/2010	1:00:26 PM	BCl3 MFC set to  0.000000
3/14/2010	1:00:26 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:00:26 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:00:26 PM	Tube furnace set to 0
3/14/2010	1:01:49 PM	Helium valve closed
3/14/2010	1:01:49 PM	H2 valve closed
3/14/2010	1:01:49 PM	BCl3 valve closed
3/14/2010	1:01:49 PM	PH3 valve closed
3/14/2010	1:01:49 PM	SiCl4 pre valve closed
3/14/2010	1:01:49 PM	SiCl4 post valve closed
3/14/2010	1:01:49 PM	Main Vac valve closed
3/14/2010	1:01:49 PM	Bypass valve closed
3/14/2010	1:01:49 PM	Bubbler valve closed
3/14/2010	1:01:49 PM	Helium MFC set to  0.000000
3/14/2010	1:01:49 PM	H2 MFC set to  0.000000
3/14/2010	1:01:49 PM	BCl3 MFC set to  0.000000
3/14/2010	1:01:49 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:01:49 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:01:49 PM	Tube furnace set to 0
3/14/2010	1:02:05 PM	Helium valve closed
3/14/2010	1:02:05 PM	H2 valve closed
3/14/2010	1:02:05 PM	BCl3 valve closed
3/14/2010	1:02:05 PM	PH3 valve closed
3/14/2010	1:02:05 PM	SiCl4 pre valve closed
3/14/2010	1:02:05 PM	SiCl4 post valve closed
3/14/2010	1:02:05 PM	Main Vac valve closed
3/14/2010	1:02:05 PM	Bubbler valve closed
3/14/2010	1:02:05 PM	Bypass valve opened
3/14/2010	1:02:05 PM	Helium MFC set to  0.000000
3/14/2010	1:02:05 PM	H2 MFC set to  0.000000
3/14/2010	1:02:05 PM	BCl3 MFC set to  0.000000
3/14/2010	1:02:05 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:02:05 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:02:05 PM	Tube furnace set to 0
3/14/2010	1:02:27 PM	Helium valve closed
3/14/2010	1:02:27 PM	H2 valve closed
3/14/2010	1:02:27 PM	BCl3 valve closed
3/14/2010	1:02:27 PM	PH3 valve closed
3/14/2010	1:02:27 PM	SiCl4 pre valve closed
3/14/2010	1:02:27 PM	SiCl4 post valve closed
3/14/2010	1:02:27 PM	Bubbler valve closed
3/14/2010	1:02:27 PM	Main Vac valve opened
3/14/2010	1:02:27 PM	Bypass valve opened
3/14/2010	1:02:27 PM	Helium MFC set to  0.000000
3/14/2010	1:02:27 PM	H2 MFC set to  0.000000
3/14/2010	1:02:27 PM	BCl3 MFC set to  0.000000
3/14/2010	1:02:27 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:02:27 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:02:27 PM	Tube furnace set to 0
3/14/2010	1:07:27 PM	H2 valve closed
3/14/2010	1:07:27 PM	BCl3 valve closed
3/14/2010	1:07:27 PM	PH3 valve closed
3/14/2010	1:07:27 PM	SiCl4 pre valve closed
3/14/2010	1:07:27 PM	SiCl4 post valve closed
3/14/2010	1:07:27 PM	Main Vac valve closed
3/14/2010	1:07:27 PM	Bypass valve closed
3/14/2010	1:07:27 PM	Bubbler valve closed
3/14/2010	1:07:27 PM	Helium valve opened
3/14/2010	1:07:27 PM	Helium MFC set to  500.000000
3/14/2010	1:07:27 PM	H2 MFC set to  0.000000
3/14/2010	1:07:27 PM	BCl3 MFC set to  0.000000
3/14/2010	1:07:27 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:07:27 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:07:27 PM	Tube furnace set to 0
3/14/2010	1:08:50 PM	Helium valve closed
3/14/2010	1:08:50 PM	H2 valve closed
3/14/2010	1:08:50 PM	BCl3 valve closed
3/14/2010	1:08:50 PM	PH3 valve closed
3/14/2010	1:08:50 PM	SiCl4 pre valve closed
3/14/2010	1:08:50 PM	SiCl4 post valve closed
3/14/2010	1:08:50 PM	Main Vac valve closed
3/14/2010	1:08:50 PM	Bypass valve closed
3/14/2010	1:08:50 PM	Bubbler valve closed
3/14/2010	1:08:50 PM	Helium MFC set to  0.000000
3/14/2010	1:08:50 PM	H2 MFC set to  0.000000
3/14/2010	1:08:50 PM	BCl3 MFC set to  0.000000
3/14/2010	1:08:50 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:08:50 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:08:50 PM	Tube furnace set to 0
3/14/2010	1:09:06 PM	Helium valve closed
3/14/2010	1:09:06 PM	H2 valve closed
3/14/2010	1:09:06 PM	BCl3 valve closed
3/14/2010	1:09:06 PM	PH3 valve closed
3/14/2010	1:09:06 PM	SiCl4 pre valve closed
3/14/2010	1:09:06 PM	SiCl4 post valve closed
3/14/2010	1:09:06 PM	Main Vac valve closed
3/14/2010	1:09:06 PM	Bubbler valve closed
3/14/2010	1:09:06 PM	Bypass valve opened
3/14/2010	1:09:06 PM	Helium MFC set to  0.000000
3/14/2010	1:09:06 PM	H2 MFC set to  0.000000
3/14/2010	1:09:06 PM	BCl3 MFC set to  0.000000
3/14/2010	1:09:06 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:09:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:09:06 PM	Tube furnace set to 0
3/14/2010	1:09:28 PM	Helium valve closed
3/14/2010	1:09:28 PM	H2 valve closed
3/14/2010	1:09:28 PM	BCl3 valve closed
3/14/2010	1:09:28 PM	PH3 valve closed
3/14/2010	1:09:28 PM	SiCl4 pre valve closed
3/14/2010	1:09:28 PM	SiCl4 post valve closed
3/14/2010	1:09:28 PM	Bubbler valve closed
3/14/2010	1:09:28 PM	Main Vac valve opened
3/14/2010	1:09:28 PM	Bypass valve opened
3/14/2010	1:09:28 PM	Helium MFC set to  0.000000
3/14/2010	1:09:28 PM	H2 MFC set to  0.000000
3/14/2010	1:09:28 PM	BCl3 MFC set to  0.000000
3/14/2010	1:09:28 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:09:28 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:09:28 PM	Tube furnace set to 0
3/14/2010	1:14:28 PM	Helium valve closed
3/14/2010	1:14:28 PM	H2 valve closed
3/14/2010	1:14:28 PM	BCl3 valve closed
3/14/2010	1:14:28 PM	PH3 valve closed
3/14/2010	1:14:28 PM	SiCl4 pre valve closed
3/14/2010	1:14:28 PM	SiCl4 post valve closed
3/14/2010	1:14:28 PM	Bubbler valve closed
3/14/2010	1:14:28 PM	Main Vac valve opened
3/14/2010	1:14:28 PM	Bypass valve opened
3/14/2010	1:14:28 PM	Helium MFC set to  0.000000
3/14/2010	1:14:28 PM	H2 MFC set to  0.000000
3/14/2010	1:14:28 PM	BCl3 MFC set to  0.000000
3/14/2010	1:14:28 PM	SiCl4 MFC set to  0.000000
3/14/2010	1:14:28 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	1:14:28 PM	Tube furnace set to 0
3/14/2010	1:14:29 PM	Run finished at 1:14 PM
3/14/2010	1:14:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/14/2010	2:41:38 PM	Main Vac valve closed
3/14/2010	2:41:41 PM	Bypass valve closed
3/14/2010	2:41:54 PM	Bypass valve opened
3/14/2010	2:41:55 PM	Main Vac valve opened
3/14/2010	2:42:37 PM	Recipe started at 2:42 PM
3/14/2010	2:42:37 PM	Helium valve closed
3/14/2010	2:42:37 PM	BCl3 valve closed
3/14/2010	2:42:37 PM	PH3 valve closed
3/14/2010	2:42:37 PM	SiCl4 pre valve closed
3/14/2010	2:42:37 PM	SiCl4 post valve closed
3/14/2010	2:42:37 PM	Main Vac valve closed
3/14/2010	2:42:37 PM	Bypass valve closed
3/14/2010	2:42:37 PM	Bubbler valve closed
3/14/2010	2:42:37 PM	H2 valve opened
3/14/2010	2:42:37 PM	Helium MFC set to  0.000000
3/14/2010	2:42:37 PM	H2 MFC set to  500.000000
3/14/2010	2:42:37 PM	BCl3 MFC set to  0.000000
3/14/2010	2:42:37 PM	SiCl4 MFC set to  0.000000
3/14/2010	2:42:37 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	2:42:37 PM	Tube furnace set to 0
3/14/2010	2:43:58 PM	Helium valve closed
3/14/2010	2:43:58 PM	BCl3 valve closed
3/14/2010	2:43:58 PM	PH3 valve closed
3/14/2010	2:43:58 PM	SiCl4 pre valve closed
3/14/2010	2:43:58 PM	SiCl4 post valve closed
3/14/2010	2:43:58 PM	Main Vac valve closed
3/14/2010	2:43:58 PM	Bypass valve closed
3/14/2010	2:43:58 PM	H2 valve opened
3/14/2010	2:43:58 PM	Bubbler valve opened
3/14/2010	2:43:58 PM	Helium MFC set to  0.000000
3/14/2010	2:43:58 PM	H2 MFC set to  500.000000
3/14/2010	2:43:58 PM	BCl3 MFC set to  0.000000
3/14/2010	2:43:58 PM	SiCl4 MFC set to  0.000000
3/14/2010	2:43:58 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	2:43:58 PM	Tube furnace set to 0
3/14/2010	3:03:59 PM	Helium valve closed
3/14/2010	3:03:59 PM	BCl3 valve closed
3/14/2010	3:03:59 PM	PH3 valve closed
3/14/2010	3:03:59 PM	Main Vac valve closed
3/14/2010	3:03:59 PM	Bypass valve closed
3/14/2010	3:03:59 PM	H2 valve opened
3/14/2010	3:03:59 PM	SiCl4 pre valve opened
3/14/2010	3:03:59 PM	SiCl4 post valve opened
3/14/2010	3:03:59 PM	Bubbler valve opened
3/14/2010	3:03:59 PM	Helium MFC set to  0.000000
3/14/2010	3:03:59 PM	H2 MFC set to  500.000000
3/14/2010	3:03:59 PM	BCl3 MFC set to  0.000000
3/14/2010	3:03:59 PM	SiCl4 MFC set to  325.000000
3/14/2010	3:03:59 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	3:03:59 PM	Tube furnace set to 0
3/14/2010	3:23:59 PM	Helium valve closed
3/14/2010	3:23:59 PM	BCl3 valve closed
3/14/2010	3:23:59 PM	PH3 valve closed
3/14/2010	3:23:59 PM	SiCl4 pre valve closed
3/14/2010	3:23:59 PM	SiCl4 post valve closed
3/14/2010	3:23:59 PM	Main Vac valve closed
3/14/2010	3:23:59 PM	Bypass valve closed
3/14/2010	3:23:59 PM	H2 valve opened
3/14/2010	3:23:59 PM	Bubbler valve opened
3/14/2010	3:23:59 PM	Helium MFC set to  0.000000
3/14/2010	3:23:59 PM	H2 MFC set to  500.000000
3/14/2010	3:23:59 PM	BCl3 MFC set to  0.000000
3/14/2010	3:23:59 PM	SiCl4 MFC set to  0.000000
3/14/2010	3:23:59 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	3:23:59 PM	Tube furnace set to 0
3/14/2010	3:44:00 PM	H2 valve closed
3/14/2010	3:44:00 PM	BCl3 valve closed
3/14/2010	3:44:00 PM	PH3 valve closed
3/14/2010	3:44:00 PM	SiCl4 pre valve closed
3/14/2010	3:44:00 PM	SiCl4 post valve closed
3/14/2010	3:44:00 PM	Main Vac valve closed
3/14/2010	3:44:00 PM	Bypass valve closed
3/14/2010	3:44:00 PM	Helium valve opened
3/14/2010	3:44:00 PM	Bubbler valve opened
3/14/2010	3:44:00 PM	Helium MFC set to  500.000000
3/14/2010	3:44:00 PM	H2 MFC set to  0.000000
3/14/2010	3:44:00 PM	BCl3 MFC set to  0.000000
3/14/2010	3:44:00 PM	SiCl4 MFC set to  0.000000
3/14/2010	3:44:00 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	3:44:00 PM	Tube furnace set to 0
3/14/2010	4:04:00 PM	Helium valve closed
3/14/2010	4:04:00 PM	H2 valve closed
3/14/2010	4:04:00 PM	BCl3 valve closed
3/14/2010	4:04:00 PM	PH3 valve closed
3/14/2010	4:04:00 PM	SiCl4 pre valve closed
3/14/2010	4:04:00 PM	SiCl4 post valve closed
3/14/2010	4:04:00 PM	Main Vac valve closed
3/14/2010	4:04:00 PM	Bypass valve closed
3/14/2010	4:04:00 PM	Bubbler valve closed
3/14/2010	4:04:00 PM	Helium MFC set to  0.000000
3/14/2010	4:04:00 PM	H2 MFC set to  0.000000
3/14/2010	4:04:00 PM	BCl3 MFC set to  0.000000
3/14/2010	4:04:00 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:04:00 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:04:00 PM	Tube furnace set to 0
3/14/2010	4:04:01 PM	Run finished at 4:04 PM
3/14/2010	4:25:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2010	4:25:42 PM	Recipe started at 4:25 PM
3/14/2010	4:25:42 PM	Helium valve closed
3/14/2010	4:25:42 PM	H2 valve closed
3/14/2010	4:25:42 PM	BCl3 valve closed
3/14/2010	4:25:42 PM	PH3 valve closed
3/14/2010	4:25:42 PM	SiCl4 pre valve closed
3/14/2010	4:25:42 PM	SiCl4 post valve closed
3/14/2010	4:25:42 PM	Main Vac valve closed
3/14/2010	4:25:42 PM	Bubbler valve closed
3/14/2010	4:25:42 PM	Bypass valve opened
3/14/2010	4:25:42 PM	Helium MFC set to  0.000000
3/14/2010	4:25:42 PM	H2 MFC set to  0.000000
3/14/2010	4:25:42 PM	BCl3 MFC set to  0.000000
3/14/2010	4:25:42 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:25:42 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:25:42 PM	Tube furnace set to 0
3/14/2010	4:26:13 PM	Helium valve closed
3/14/2010	4:26:13 PM	H2 valve closed
3/14/2010	4:26:13 PM	BCl3 valve closed
3/14/2010	4:26:13 PM	PH3 valve closed
3/14/2010	4:26:13 PM	SiCl4 pre valve closed
3/14/2010	4:26:13 PM	SiCl4 post valve closed
3/14/2010	4:26:13 PM	Bubbler valve closed
3/14/2010	4:26:13 PM	Main Vac valve opened
3/14/2010	4:26:13 PM	Bypass valve opened
3/14/2010	4:26:13 PM	Helium MFC set to  0.000000
3/14/2010	4:26:13 PM	H2 MFC set to  0.000000
3/14/2010	4:26:13 PM	BCl3 MFC set to  0.000000
3/14/2010	4:26:13 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:26:13 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:26:13 PM	Tube furnace set to 0
3/14/2010	4:26:14 PM	Run finished at 4:26 PM
3/14/2010	4:26:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2010	4:28:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/14/2010	4:28:37 PM	Recipe started at 4:28 PM
3/14/2010	4:28:37 PM	H2 valve closed
3/14/2010	4:28:37 PM	BCl3 valve closed
3/14/2010	4:28:37 PM	PH3 valve closed
3/14/2010	4:28:37 PM	SiCl4 pre valve closed
3/14/2010	4:28:37 PM	SiCl4 post valve closed
3/14/2010	4:28:37 PM	Main Vac valve closed
3/14/2010	4:28:37 PM	Bypass valve closed
3/14/2010	4:28:37 PM	Bubbler valve closed
3/14/2010	4:28:37 PM	Helium valve opened
3/14/2010	4:28:37 PM	Helium MFC set to  500.000000
3/14/2010	4:28:37 PM	H2 MFC set to  0.000000
3/14/2010	4:28:37 PM	BCl3 MFC set to  0.000000
3/14/2010	4:28:37 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:28:37 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:28:37 PM	Tube furnace set to 0
3/14/2010	4:29:59 PM	Helium valve closed
3/14/2010	4:29:59 PM	H2 valve closed
3/14/2010	4:29:59 PM	BCl3 valve closed
3/14/2010	4:29:59 PM	PH3 valve closed
3/14/2010	4:29:59 PM	SiCl4 pre valve closed
3/14/2010	4:29:59 PM	SiCl4 post valve closed
3/14/2010	4:29:59 PM	Main Vac valve closed
3/14/2010	4:29:59 PM	Bypass valve closed
3/14/2010	4:29:59 PM	Bubbler valve closed
3/14/2010	4:29:59 PM	Helium MFC set to  0.000000
3/14/2010	4:29:59 PM	H2 MFC set to  0.000000
3/14/2010	4:29:59 PM	BCl3 MFC set to  0.000000
3/14/2010	4:29:59 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:29:59 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:29:59 PM	Tube furnace set to 0
3/14/2010	4:30:14 PM	Helium valve closed
3/14/2010	4:30:14 PM	H2 valve closed
3/14/2010	4:30:14 PM	BCl3 valve closed
3/14/2010	4:30:14 PM	PH3 valve closed
3/14/2010	4:30:14 PM	SiCl4 pre valve closed
3/14/2010	4:30:14 PM	SiCl4 post valve closed
3/14/2010	4:30:14 PM	Main Vac valve closed
3/14/2010	4:30:14 PM	Bubbler valve closed
3/14/2010	4:30:14 PM	Bypass valve opened
3/14/2010	4:30:14 PM	Helium MFC set to  0.000000
3/14/2010	4:30:14 PM	H2 MFC set to  0.000000
3/14/2010	4:30:14 PM	BCl3 MFC set to  0.000000
3/14/2010	4:30:14 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:30:14 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:30:14 PM	Tube furnace set to 0
3/14/2010	4:30:36 PM	Helium valve closed
3/14/2010	4:30:36 PM	H2 valve closed
3/14/2010	4:30:36 PM	BCl3 valve closed
3/14/2010	4:30:36 PM	PH3 valve closed
3/14/2010	4:30:36 PM	SiCl4 pre valve closed
3/14/2010	4:30:36 PM	SiCl4 post valve closed
3/14/2010	4:30:36 PM	Bubbler valve closed
3/14/2010	4:30:36 PM	Main Vac valve opened
3/14/2010	4:30:36 PM	Bypass valve opened
3/14/2010	4:30:36 PM	Helium MFC set to  0.000000
3/14/2010	4:30:36 PM	H2 MFC set to  0.000000
3/14/2010	4:30:36 PM	BCl3 MFC set to  0.000000
3/14/2010	4:30:36 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:30:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:30:36 PM	Tube furnace set to 0
3/14/2010	4:35:36 PM	H2 valve closed
3/14/2010	4:35:36 PM	BCl3 valve closed
3/14/2010	4:35:36 PM	PH3 valve closed
3/14/2010	4:35:36 PM	SiCl4 pre valve closed
3/14/2010	4:35:36 PM	SiCl4 post valve closed
3/14/2010	4:35:36 PM	Main Vac valve closed
3/14/2010	4:35:36 PM	Bypass valve closed
3/14/2010	4:35:36 PM	Bubbler valve closed
3/14/2010	4:35:36 PM	Helium valve opened
3/14/2010	4:35:36 PM	Helium MFC set to  500.000000
3/14/2010	4:35:36 PM	H2 MFC set to  0.000000
3/14/2010	4:35:36 PM	BCl3 MFC set to  0.000000
3/14/2010	4:35:36 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:35:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:35:36 PM	Tube furnace set to 0
3/14/2010	4:36:58 PM	Helium valve closed
3/14/2010	4:36:58 PM	H2 valve closed
3/14/2010	4:36:58 PM	BCl3 valve closed
3/14/2010	4:36:58 PM	PH3 valve closed
3/14/2010	4:36:58 PM	SiCl4 pre valve closed
3/14/2010	4:36:58 PM	SiCl4 post valve closed
3/14/2010	4:36:58 PM	Main Vac valve closed
3/14/2010	4:36:58 PM	Bypass valve closed
3/14/2010	4:36:58 PM	Bubbler valve closed
3/14/2010	4:36:58 PM	Helium MFC set to  0.000000
3/14/2010	4:36:58 PM	H2 MFC set to  0.000000
3/14/2010	4:36:58 PM	BCl3 MFC set to  0.000000
3/14/2010	4:36:58 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:36:58 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:36:58 PM	Tube furnace set to 0
3/14/2010	4:37:14 PM	Helium valve closed
3/14/2010	4:37:14 PM	H2 valve closed
3/14/2010	4:37:14 PM	BCl3 valve closed
3/14/2010	4:37:14 PM	PH3 valve closed
3/14/2010	4:37:14 PM	SiCl4 pre valve closed
3/14/2010	4:37:14 PM	SiCl4 post valve closed
3/14/2010	4:37:14 PM	Main Vac valve closed
3/14/2010	4:37:14 PM	Bubbler valve closed
3/14/2010	4:37:14 PM	Bypass valve opened
3/14/2010	4:37:14 PM	Helium MFC set to  0.000000
3/14/2010	4:37:14 PM	H2 MFC set to  0.000000
3/14/2010	4:37:14 PM	BCl3 MFC set to  0.000000
3/14/2010	4:37:14 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:37:14 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:37:14 PM	Tube furnace set to 0
3/14/2010	4:37:36 PM	Helium valve closed
3/14/2010	4:37:36 PM	H2 valve closed
3/14/2010	4:37:36 PM	BCl3 valve closed
3/14/2010	4:37:36 PM	PH3 valve closed
3/14/2010	4:37:36 PM	SiCl4 pre valve closed
3/14/2010	4:37:36 PM	SiCl4 post valve closed
3/14/2010	4:37:36 PM	Bubbler valve closed
3/14/2010	4:37:36 PM	Main Vac valve opened
3/14/2010	4:37:36 PM	Bypass valve opened
3/14/2010	4:37:36 PM	Helium MFC set to  0.000000
3/14/2010	4:37:36 PM	H2 MFC set to  0.000000
3/14/2010	4:37:36 PM	BCl3 MFC set to  0.000000
3/14/2010	4:37:36 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:37:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:37:36 PM	Tube furnace set to 0
3/14/2010	4:42:36 PM	H2 valve closed
3/14/2010	4:42:36 PM	BCl3 valve closed
3/14/2010	4:42:36 PM	PH3 valve closed
3/14/2010	4:42:36 PM	SiCl4 pre valve closed
3/14/2010	4:42:36 PM	SiCl4 post valve closed
3/14/2010	4:42:36 PM	Main Vac valve closed
3/14/2010	4:42:36 PM	Bypass valve closed
3/14/2010	4:42:36 PM	Bubbler valve closed
3/14/2010	4:42:36 PM	Helium valve opened
3/14/2010	4:42:36 PM	Helium MFC set to  500.000000
3/14/2010	4:42:36 PM	H2 MFC set to  0.000000
3/14/2010	4:42:36 PM	BCl3 MFC set to  0.000000
3/14/2010	4:42:36 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:42:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:42:36 PM	Tube furnace set to 0
3/14/2010	4:43:58 PM	Helium valve closed
3/14/2010	4:43:58 PM	H2 valve closed
3/14/2010	4:43:58 PM	BCl3 valve closed
3/14/2010	4:43:58 PM	PH3 valve closed
3/14/2010	4:43:58 PM	SiCl4 pre valve closed
3/14/2010	4:43:58 PM	SiCl4 post valve closed
3/14/2010	4:43:58 PM	Main Vac valve closed
3/14/2010	4:43:58 PM	Bypass valve closed
3/14/2010	4:43:58 PM	Bubbler valve closed
3/14/2010	4:43:58 PM	Helium MFC set to  0.000000
3/14/2010	4:43:58 PM	H2 MFC set to  0.000000
3/14/2010	4:43:58 PM	BCl3 MFC set to  0.000000
3/14/2010	4:43:58 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:43:58 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:43:58 PM	Tube furnace set to 0
3/14/2010	4:44:14 PM	Helium valve closed
3/14/2010	4:44:14 PM	H2 valve closed
3/14/2010	4:44:14 PM	BCl3 valve closed
3/14/2010	4:44:14 PM	PH3 valve closed
3/14/2010	4:44:14 PM	SiCl4 pre valve closed
3/14/2010	4:44:14 PM	SiCl4 post valve closed
3/14/2010	4:44:14 PM	Main Vac valve closed
3/14/2010	4:44:14 PM	Bubbler valve closed
3/14/2010	4:44:14 PM	Bypass valve opened
3/14/2010	4:44:14 PM	Helium MFC set to  0.000000
3/14/2010	4:44:14 PM	H2 MFC set to  0.000000
3/14/2010	4:44:14 PM	BCl3 MFC set to  0.000000
3/14/2010	4:44:14 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:44:14 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:44:14 PM	Tube furnace set to 0
3/14/2010	4:44:36 PM	Helium valve closed
3/14/2010	4:44:36 PM	H2 valve closed
3/14/2010	4:44:36 PM	BCl3 valve closed
3/14/2010	4:44:36 PM	PH3 valve closed
3/14/2010	4:44:36 PM	SiCl4 pre valve closed
3/14/2010	4:44:36 PM	SiCl4 post valve closed
3/14/2010	4:44:36 PM	Bubbler valve closed
3/14/2010	4:44:36 PM	Main Vac valve opened
3/14/2010	4:44:36 PM	Bypass valve opened
3/14/2010	4:44:36 PM	Helium MFC set to  0.000000
3/14/2010	4:44:36 PM	H2 MFC set to  0.000000
3/14/2010	4:44:36 PM	BCl3 MFC set to  0.000000
3/14/2010	4:44:36 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:44:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:44:36 PM	Tube furnace set to 0
3/14/2010	4:49:36 PM	Helium valve closed
3/14/2010	4:49:36 PM	H2 valve closed
3/14/2010	4:49:36 PM	BCl3 valve closed
3/14/2010	4:49:36 PM	PH3 valve closed
3/14/2010	4:49:36 PM	SiCl4 pre valve closed
3/14/2010	4:49:36 PM	SiCl4 post valve closed
3/14/2010	4:49:36 PM	Bubbler valve closed
3/14/2010	4:49:36 PM	Main Vac valve opened
3/14/2010	4:49:36 PM	Bypass valve opened
3/14/2010	4:49:36 PM	Helium MFC set to  0.000000
3/14/2010	4:49:36 PM	H2 MFC set to  0.000000
3/14/2010	4:49:36 PM	BCl3 MFC set to  0.000000
3/14/2010	4:49:36 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:49:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:49:36 PM	Tube furnace set to 0
3/14/2010	4:49:37 PM	Run finished at 4:49 PM
3/14/2010	4:49:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/14/2010	4:52:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2010	4:52:51 PM	Recipe started at 4:52 PM
3/14/2010	4:52:51 PM	H2 valve closed
3/14/2010	4:52:51 PM	BCl3 valve closed
3/14/2010	4:52:51 PM	PH3 valve closed
3/14/2010	4:52:51 PM	SiCl4 pre valve closed
3/14/2010	4:52:51 PM	SiCl4 post valve closed
3/14/2010	4:52:51 PM	Main Vac valve closed
3/14/2010	4:52:51 PM	Bypass valve closed
3/14/2010	4:52:51 PM	Bubbler valve closed
3/14/2010	4:52:51 PM	Helium valve opened
3/14/2010	4:52:51 PM	Helium MFC set to  500.000000
3/14/2010	4:52:51 PM	H2 MFC set to  0.000000
3/14/2010	4:52:51 PM	BCl3 MFC set to  0.000000
3/14/2010	4:52:51 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:52:51 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:52:51 PM	Tube furnace set to 0
3/14/2010	4:54:12 PM	Helium valve closed
3/14/2010	4:54:12 PM	H2 valve closed
3/14/2010	4:54:12 PM	BCl3 valve closed
3/14/2010	4:54:12 PM	PH3 valve closed
3/14/2010	4:54:12 PM	SiCl4 pre valve closed
3/14/2010	4:54:12 PM	SiCl4 post valve closed
3/14/2010	4:54:12 PM	Main Vac valve closed
3/14/2010	4:54:12 PM	Bypass valve closed
3/14/2010	4:54:12 PM	Bubbler valve closed
3/14/2010	4:54:12 PM	Helium MFC set to  0.000000
3/14/2010	4:54:12 PM	H2 MFC set to  0.000000
3/14/2010	4:54:12 PM	BCl3 MFC set to  0.000000
3/14/2010	4:54:12 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:54:12 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:54:12 PM	Tube furnace set to 0
3/14/2010	4:54:12 PM	Run finished at 4:54 PM
3/14/2010	4:54:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2010	4:54:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2010	4:54:24 PM	Recipe started at 4:54 PM
3/14/2010	4:54:24 PM	Helium valve closed
3/14/2010	4:54:24 PM	H2 valve closed
3/14/2010	4:54:24 PM	BCl3 valve closed
3/14/2010	4:54:24 PM	PH3 valve closed
3/14/2010	4:54:24 PM	SiCl4 pre valve closed
3/14/2010	4:54:24 PM	SiCl4 post valve closed
3/14/2010	4:54:24 PM	Main Vac valve closed
3/14/2010	4:54:24 PM	Bubbler valve closed
3/14/2010	4:54:24 PM	Bypass valve opened
3/14/2010	4:54:24 PM	Helium MFC set to  0.000000
3/14/2010	4:54:24 PM	H2 MFC set to  0.000000
3/14/2010	4:54:24 PM	BCl3 MFC set to  0.000000
3/14/2010	4:54:24 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:54:24 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:54:24 PM	Tube furnace set to 0
3/14/2010	4:54:46 PM	Helium valve closed
3/14/2010	4:54:46 PM	H2 valve closed
3/14/2010	4:54:46 PM	BCl3 valve closed
3/14/2010	4:54:46 PM	PH3 valve closed
3/14/2010	4:54:46 PM	SiCl4 pre valve closed
3/14/2010	4:54:46 PM	SiCl4 post valve closed
3/14/2010	4:54:46 PM	Bubbler valve closed
3/14/2010	4:54:46 PM	Main Vac valve opened
3/14/2010	4:54:46 PM	Bypass valve opened
3/14/2010	4:54:46 PM	Helium MFC set to  0.000000
3/14/2010	4:54:46 PM	H2 MFC set to  0.000000
3/14/2010	4:54:46 PM	BCl3 MFC set to  0.000000
3/14/2010	4:54:46 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:54:46 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:54:46 PM	Tube furnace set to 0
3/14/2010	4:54:47 PM	Run finished at 4:54 PM
3/14/2010	4:54:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2010	4:56:18 PM	Main Vac valve closed
3/14/2010	4:56:20 PM	Bypass valve closed
3/14/2010	4:56:32 PM	Bypass valve opened
3/14/2010	4:56:33 PM	Main Vac valve opened
3/14/2010	4:59:39 PM	Recipe started at 4:59 PM
3/14/2010	4:59:39 PM	Helium valve closed
3/14/2010	4:59:39 PM	BCl3 valve closed
3/14/2010	4:59:39 PM	PH3 valve closed
3/14/2010	4:59:39 PM	SiCl4 pre valve closed
3/14/2010	4:59:39 PM	SiCl4 post valve closed
3/14/2010	4:59:39 PM	Main Vac valve closed
3/14/2010	4:59:39 PM	Bypass valve closed
3/14/2010	4:59:39 PM	Bubbler valve closed
3/14/2010	4:59:39 PM	H2 valve opened
3/14/2010	4:59:39 PM	Helium MFC set to  0.000000
3/14/2010	4:59:39 PM	H2 MFC set to  500.000000
3/14/2010	4:59:39 PM	BCl3 MFC set to  0.000000
3/14/2010	4:59:39 PM	SiCl4 MFC set to  0.000000
3/14/2010	4:59:39 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	4:59:39 PM	Tube furnace set to 0
3/14/2010	5:01:00 PM	Helium valve closed
3/14/2010	5:01:00 PM	BCl3 valve closed
3/14/2010	5:01:00 PM	PH3 valve closed
3/14/2010	5:01:00 PM	SiCl4 pre valve closed
3/14/2010	5:01:00 PM	SiCl4 post valve closed
3/14/2010	5:01:00 PM	Main Vac valve closed
3/14/2010	5:01:00 PM	Bypass valve closed
3/14/2010	5:01:00 PM	H2 valve opened
3/14/2010	5:01:00 PM	Bubbler valve opened
3/14/2010	5:01:00 PM	Helium MFC set to  0.000000
3/14/2010	5:01:00 PM	H2 MFC set to  500.000000
3/14/2010	5:01:00 PM	BCl3 MFC set to  0.000000
3/14/2010	5:01:00 PM	SiCl4 MFC set to  0.000000
3/14/2010	5:01:00 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	5:01:00 PM	Tube furnace set to 0
3/14/2010	5:21:01 PM	Helium valve closed
3/14/2010	5:21:01 PM	BCl3 valve closed
3/14/2010	5:21:01 PM	PH3 valve closed
3/14/2010	5:21:01 PM	Main Vac valve closed
3/14/2010	5:21:01 PM	Bypass valve closed
3/14/2010	5:21:01 PM	H2 valve opened
3/14/2010	5:21:01 PM	SiCl4 pre valve opened
3/14/2010	5:21:01 PM	SiCl4 post valve opened
3/14/2010	5:21:01 PM	Bubbler valve opened
3/14/2010	5:21:01 PM	Helium MFC set to  0.000000
3/14/2010	5:21:01 PM	H2 MFC set to  500.000000
3/14/2010	5:21:01 PM	BCl3 MFC set to  0.000000
3/14/2010	5:21:01 PM	SiCl4 MFC set to  325.000000
3/14/2010	5:21:01 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	5:21:01 PM	Tube furnace set to 0
3/14/2010	5:41:01 PM	Helium valve closed
3/14/2010	5:41:01 PM	BCl3 valve closed
3/14/2010	5:41:01 PM	PH3 valve closed
3/14/2010	5:41:01 PM	SiCl4 pre valve closed
3/14/2010	5:41:01 PM	SiCl4 post valve closed
3/14/2010	5:41:01 PM	Main Vac valve closed
3/14/2010	5:41:01 PM	Bypass valve closed
3/14/2010	5:41:01 PM	H2 valve opened
3/14/2010	5:41:01 PM	Bubbler valve opened
3/14/2010	5:41:01 PM	Helium MFC set to  0.000000
3/14/2010	5:41:01 PM	H2 MFC set to  500.000000
3/14/2010	5:41:01 PM	BCl3 MFC set to  0.000000
3/14/2010	5:41:01 PM	SiCl4 MFC set to  0.000000
3/14/2010	5:41:01 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	5:41:01 PM	Tube furnace set to 0
3/14/2010	6:01:02 PM	H2 valve closed
3/14/2010	6:01:02 PM	BCl3 valve closed
3/14/2010	6:01:02 PM	PH3 valve closed
3/14/2010	6:01:02 PM	SiCl4 pre valve closed
3/14/2010	6:01:02 PM	SiCl4 post valve closed
3/14/2010	6:01:02 PM	Main Vac valve closed
3/14/2010	6:01:02 PM	Bypass valve closed
3/14/2010	6:01:02 PM	Helium valve opened
3/14/2010	6:01:02 PM	Bubbler valve opened
3/14/2010	6:01:02 PM	Helium MFC set to  500.000000
3/14/2010	6:01:02 PM	H2 MFC set to  0.000000
3/14/2010	6:01:02 PM	BCl3 MFC set to  0.000000
3/14/2010	6:01:02 PM	SiCl4 MFC set to  0.000000
3/14/2010	6:01:02 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	6:01:02 PM	Tube furnace set to 0
3/14/2010	6:14:39 PM	Run aborted at 6:14 PM
3/14/2010	6:14:39 PM	Helium valve closed
3/14/2010	6:14:39 PM	H2 valve closed
3/14/2010	6:14:39 PM	BCl3 valve closed
3/14/2010	6:14:39 PM	PH3 valve closed
3/14/2010	6:14:39 PM	SiCl4 pre valve closed
3/14/2010	6:14:39 PM	SiCl4 post valve closed
3/14/2010	6:14:39 PM	Bypass valve closed
3/14/2010	6:14:39 PM	Main Vac valve closed
3/14/2010	6:14:39 PM	Bubbler valve closed
3/14/2010	6:14:39 PM	Helium MFC set to  0.000000
3/14/2010	6:14:39 PM	H2 MFC set to  0.000000
3/14/2010	6:14:39 PM	BCl3 MFC set to  0.000000
3/14/2010	6:14:39 PM	SiCl4 MFC set to  0.000000
3/14/2010	6:14:39 PM	Tube furnace set to 0
3/14/2010	6:16:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2010	6:16:33 PM	Recipe started at 6:16 PM
3/14/2010	6:16:33 PM	Helium valve closed
3/14/2010	6:16:33 PM	H2 valve closed
3/14/2010	6:16:33 PM	BCl3 valve closed
3/14/2010	6:16:33 PM	PH3 valve closed
3/14/2010	6:16:33 PM	SiCl4 pre valve closed
3/14/2010	6:16:33 PM	SiCl4 post valve closed
3/14/2010	6:16:33 PM	Main Vac valve closed
3/14/2010	6:16:33 PM	Bubbler valve closed
3/14/2010	6:16:33 PM	Bypass valve opened
3/14/2010	6:16:33 PM	Helium MFC set to  0.000000
3/14/2010	6:16:33 PM	H2 MFC set to  0.000000
3/14/2010	6:16:33 PM	BCl3 MFC set to  0.000000
3/14/2010	6:16:33 PM	SiCl4 MFC set to  0.000000
3/14/2010	6:16:33 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	6:16:33 PM	Tube furnace set to 0
3/14/2010	6:17:02 PM	Helium valve closed
3/14/2010	6:17:02 PM	H2 valve closed
3/14/2010	6:17:02 PM	BCl3 valve closed
3/14/2010	6:17:02 PM	PH3 valve closed
3/14/2010	6:17:02 PM	SiCl4 pre valve closed
3/14/2010	6:17:02 PM	SiCl4 post valve closed
3/14/2010	6:17:02 PM	Bubbler valve closed
3/14/2010	6:17:02 PM	Main Vac valve opened
3/14/2010	6:17:02 PM	Bypass valve opened
3/14/2010	6:17:02 PM	Helium MFC set to  0.000000
3/14/2010	6:17:02 PM	H2 MFC set to  0.000000
3/14/2010	6:17:02 PM	BCl3 MFC set to  0.000000
3/14/2010	6:17:02 PM	SiCl4 MFC set to  0.000000
3/14/2010	6:17:02 PM	Bypass solenoid MFC set to  0.000000
3/14/2010	6:17:02 PM	Tube furnace set to 0
3/14/2010	6:17:03 PM	Run finished at 6:17 PM
3/14/2010	6:17:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
